Invention Grant
- Patent Title: Fluoropolymer mask for transistor channel definition
- Patent Title (中): 氟聚合物掩模,用于晶体管通道定义
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Application No.: US13471799Application Date: 2012-05-15
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Publication No.: US08796083B2Publication Date: 2014-08-05
- Inventor: Kurt Ulmer , Kanan Puntambekar
- Applicant: Kurt Ulmer , Kanan Puntambekar
- Applicant Address: US WA Camas
- Assignee: Sharp Laboratories of America, Inc.
- Current Assignee: Sharp Laboratories of America, Inc.
- Current Assignee Address: US WA Camas
- Agency: Law Office of Gerald Maliszewski
- Agent Gerald Maliszewski
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L21/288 ; H01L29/417

Abstract:
A method is provided for controlling the channel length in a thin-film transistor (TFT). The method forms a printed ink first source/drain (S/D) structure overlying a substrate. A fluoropolymer mask is deposited to cover the first S/D structure. A boundary region is formed between the edge of the fluoropolymer mask and the edge of the printed ink first S/D structure, having a width. Then, a primary ink is printed at least partially overlying the boundary region, forming a printed ink second S/D structure, having an edge adjacent to the fluoropolymer mask edge. After removing the fluoropolymer mask, the printed ink first S/D structure edge is left separated from the printed ink second S/D structure edge by a space equal to the boundary region width. A semiconductor channel is formed partially overlying the first and second S/D structures, having a channel length equal to the boundary region width.
Public/Granted literature
- US20130307073A1 Fluoropolymer Mask for Transistor Channel Definition Public/Granted day:2013-11-21
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