Aerodynamic jetting of blended aerosolized materials

Invention Grant

US08796146B2 Aerodynamic jetting of blended aerosolized materials 有权

Title translation: 混合气雾化材料的气动喷射

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Patent Title: Aerodynamic jetting of blended aerosolized materials
Patent Title (中): 混合气雾化材料的气动喷射
Application No.: US12720573

Application Date: 2010-03-09
Publication No.: US08796146B2

Publication Date: 2014-08-05
Inventor: Michael J. Renn , Bruce H. King , Jason A. Paulsen
Applicant: Michael J. Renn , Bruce H. King , Jason A. Paulsen
Applicant Address: US NM Albuquerque
Assignee: Optomec, Inc.
Current Assignee: Optomec, Inc.
Current Assignee Address: US NM Albuquerque
Agency: Peacock Myers, P.C.
Agent Philip D. Askenazy
Main IPC: H01L21/311
IPC: H01L21/311

Aerodynamic jetting of blended aerosolized materials

Abstract:

Method and apparatus for direct writing of passive structures having a tolerance of 5% or less in one or more physical, electrical, chemical, or optical properties. The present apparatus is capable of extended deposition times. The apparatus may be configured for unassisted operation and uses sensors and feedback loops to detect physical characteristics of the system to identify and maintain optimum process parameters.

Abstract(Chinese):

用于在一种或多种物理，电学，化学或光学性质中直接写入具有5％或更小的公差的被动结构的方法和装置。本装置能够延长沉积时间。该装置可以被配置为无辅助操作，并且使用传感器和反馈回路来检测系统的物理特性以识别和维持最佳过程参数。

Public/Granted literature

US20100255209A1 Aerodynamic Jetting of Blended Aerosolized Materials Public/Granted day:2010-10-07

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/02	.半导体器件或其部件的制造或处理
H01L21/04	..至少具有一个跃变势垒或表面势垒的器件，例如PN结、耗尽层、载体集结层
H01L21/18	...器件有由周期表Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体，如掺杂材料
H01L21/30	....用H01L21/20至H01L21/26各组不包含的方法或设备处理半导体材料的（在半导体材料上制作电极的入H01L21/28）
H01L21/31	.....在半导体材料上形成绝缘层的，例如用于掩膜的或应用光刻技术的（密封层入H01L21/56）；以及这些层的后处理；这些层的材料的选择
H01L21/3105	......后处理
H01L21/311	.......绝缘层的刻蚀