Invention Grant
- Patent Title: Method for fabricating substrate with nano structures, light emitting device and manufacturing method thereof
- Patent Title (中): 用纳米结构制造衬底的方法，发光器件及其制造方法
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Application No.: US11638406Application Date: 2006-12-14
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Publication No.: US08796698B2Publication Date: 2014-08-05
- Inventor: Jong Wook Kim , Hyun Kyong Cho
- Applicant: Jong Wook Kim , Hyun Kyong Cho
- Applicant Address: KR Seoul KR Seoul
- Assignee: LG Electronics Inc.,LG Innotek Co., Ltd.
- Current Assignee: LG Electronics Inc.,LG Innotek Co., Ltd.
- Current Assignee Address: KR Seoul KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2005-0123861 20051215
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00
Abstract:
A method of fabricating a substrate with nano structures, light emitting device using the substrate and a manufacturing method thereof, wherein a substrate for growing a light emitting device is formed with nano agglomerations, and the substrate is etched by using the agglomerations as a mask to allow nano structures to be formed on the substrate, thereby enabling to grow a crystal defect-reduced, reliability-improved, good quality light emitting structure, and wherein the light emitting structure is formed with nano structures to enhance the light extraction efficiency.
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