Invention Grant
- Patent Title: Fabrication of a vertical heterojunction tunnel-FET
- Patent Title (中): 垂直异质结隧道FET的制造
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Application No.: US13430041Application Date: 2012-03-26
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Publication No.: US08796735B2Publication Date: 2014-08-05
- Inventor: Isaac Lauer , Amlan Majumdar , Paul M. Solomon , Steven J. Koester
- Applicant: Isaac Lauer , Amlan Majumdar , Paul M. Solomon , Steven J. Koester
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/336 ; H01L29/165 ; H01L29/739

Abstract:
Exemplary embodiments include a method for fabricating a heterojunction tunnel field-effect-transistor (FET), the method including forming a gate region on a silicon layer of a silicon-on-insulator (SOI) substrate, forming a drain region on the silicon layer adjacent the gate region and forming a vertical heterojunction source region adjacent the gate region, wherein the vertical heterojunction source region generates a tunnel path inline with a gate field associated with the gate region.
Public/Granted literature
- US20120193678A1 FABRICATION OF A VERTICAL HETEROJUNCTION TUNNEL-FET Public/Granted day:2012-08-02
Information query
IPC分类: