Invention Grant
US08796764B2 Semiconductor device comprising trench gate and buried source electrodes 有权
半导体器件包括沟槽栅和掩埋源电极

Semiconductor device comprising trench gate and buried source electrodes
Abstract:
A semiconductor device includes a semiconductor substrate, a trench, a buried insulated source electrode arranged in a bottom portion of the trench, a first gate electrode and a second gate electrode arranged in an upper portion of the trench and spaced apart from one another. A surface gate contact extends into the upper portion of the trench and is in physical and electrical contact with the first gate electrode and second gate electrode.
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