Invention Grant
US08796820B2 Semiconductor wafer and semiconductor device wafer 有权
半导体晶圆和半导体器件晶圆

Semiconductor wafer and semiconductor device wafer
Abstract:
A semiconductor wafer having a disc shape includes a chamfer provided around a circumferential edge of the wafer, and an anti-cracking and chipping groove provided in one or more areas around one circumference of an end face of the wafer along a circumferential direction of the end face. The anti-cracking and chipping groove is configured to prevent cracking or chipping of the end face in back grinding.
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