Invention Grant
US08796901B2 Micro-electro-mechanical transducer having an insulation extension 有权
具有绝缘延伸的微机电传感器

  • Patent Title: Micro-electro-mechanical transducer having an insulation extension
  • Patent Title (中): 具有绝缘延伸的微机电传感器
  • Application No.: US11917666
    Application Date: 2006-06-16
  • Publication No.: US08796901B2
    Publication Date: 2014-08-05
  • Inventor: Yongli Huang
  • Applicant: Yongli Huang
  • Applicant Address: US CA San Jose
  • Assignee: Kolo Technologies, Inc.
  • Current Assignee: Kolo Technologies, Inc.
  • Current Assignee Address: US CA San Jose
  • Agency: Lee & Hayes, PLLC
  • International Application: PCT/IB2006/051948 WO 20060616
  • International Announcement: WO2006/134580 WO 20061221
  • Main IPC: H02N1/00
  • IPC: H02N1/00 H04R19/00 B81B3/00
Micro-electro-mechanical transducer having an insulation extension
Abstract:
A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap therebetween. The insulator has an insulating support disposed generally between the two electrodes and an insulation extension extending into at least one of two electrodes to increase the effective insulation without having to increase the transducing gap. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate.
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