Invention Grant
US08797053B2 Positioning and socketing for semiconductor dice 有权
半导体芯片的定位和插槽

Positioning and socketing for semiconductor dice
Abstract:
Devices and methods useful for testing bare and packaged semiconductor dice are provided. As integrated circuit chips become smaller and increasingly complex, the interface presented by a chip for connectivity with power supplies and other components of the system into which it is integrated similarly becomes smaller and more complex. Embodiments of the invention provide micron-scale accuracy alignment capabilities for fine pitch device first level interconnect areas. Embodiments of the invention employ air-bearings to effectuate the movement and alignment of a device under test with a testing interface. Additionally, testing interfaces comprising membranes supported by thermal fluids are provided.
Public/Granted literature
Information query
Patent Agency Ranking
0/0