Invention Grant
- Patent Title: Interferometer with a virtual reference surface
- Patent Title (中): 干涉仪带有虚拟参考面
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Application No.: US13293685Application Date: 2011-11-10
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Publication No.: US08797537B2Publication Date: 2014-08-05
- Inventor: Klaus Freischlad
- Applicant: Klaus Freischlad
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An imaging interferometer includes optics defining an interferometric cavity, in which the optics include a first beam-splitting optic positioned to separate an input beam into a test beam and a reference beam, a second beam-splitting optic positioned to transmit the test beam to the test surface, receive the test beam back from the test surface, and thereafter recombine the test beam with the reference beam, and a third optic positioned to direct the reference beam from the first optic to the second optic. The interferometric cavity defines a virtual reference surface positioned along a path for the reference beam between the second and third optics. The interferometer also includes an imaging channel positioned to receive the recombined test and reference beams, where the imaging channel includes an imaging detector, and at least one imaging element configured to image the test surface and the virtual reference surface onto the detector.
Public/Granted literature
- US20120120411A1 INTERFEROMETER WITH A VIRTUAL REFERENCE SURFACE Public/Granted day:2012-05-17
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