Invention Grant
US08797546B2 Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element 有权
使用扫描板的干涉测距装置和含有反射器元件的透明载体基板

Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element
Abstract:
An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.
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