Invention Grant
- Patent Title: Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element
- Patent Title (中): 使用扫描板的干涉测距装置和含有反射器元件的透明载体基板
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Application No.: US13423481Application Date: 2012-03-19
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Publication No.: US08797546B2Publication Date: 2014-08-05
- Inventor: Walter Huber , Ralph Joerger
- Applicant: Walter Huber , Ralph Joerger
- Applicant Address: DE Traunreut
- Assignee: Dr. Johannes Heidenhain GmbH
- Current Assignee: Dr. Johannes Heidenhain GmbH
- Current Assignee Address: DE Traunreut
- Agency: Brinks Gilson & Lione
- Priority: DE102011005937 20110323
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.
Public/Granted literature
- US20120242994A1 INTERFEROMETRIC DISTANCE MEASUREMENT DEVICE Public/Granted day:2012-09-27
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