Invention Grant
- Patent Title: Method and configuration for the optical detection of an illuminated specimen
- Patent Title (中): 照明样本的光学检测方法和结构
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Application No.: US13966714Application Date: 2013-08-14
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Publication No.: US08797645B2Publication Date: 2014-08-05
- Inventor: Michael Schwertner , Ralf Wolleschensky , Michael Kempe
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss MicroImaging GmbH
- Current Assignee: Carl Zeiss MicroImaging GmbH
- Current Assignee Address: DE Jena
- Agency: Duane Morris LLP
- Main IPC: G02B21/14
- IPC: G02B21/14

Abstract:
A method for the optical detection of an illuminated specimen, wherein the illuminating light impinges in a spatially structured manner in at least one plane on the specimen and several images of the specimen are acquired by a detector in different positions of the structure on the specimen. An optical sectional image and/or an image with enhanced resolution is then calculated. The method includes generating a diffraction pattern in the direction of the specimen in or near the pupil of the objective lens or in a plane conjugate to the pupil. A phase plate with regions of varying phase delays is dedicated to the diffraction pattern in or near the pupil of the objective lens or in a plane conjugate to said pupil, and different phase angles of the illuminating light are set.
Public/Granted literature
- US20130329284A1 Method and Configuration for the Optical Detection of an Illuminated Specimen Public/Granted day:2013-12-12
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