Invention Grant
- Patent Title: Layout decomposition method and apparatus for multiple patterning lithography
- Patent Title (中): 布图分解方法和装置用于多重图案化光刻
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Application No.: US13016033Application Date: 2011-01-28
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Publication No.: US08799844B2Publication Date: 2014-08-05
- Inventor: Minsik Cho , Xiaoping Tang
- Applicant: Minsik Cho , Xiaoping Tang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Preston J. Young
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
An initial layout of at least a portion of a given layer of an integrated circuit design is decomposed into multiple sub-layouts by splitting each of a plurality of shapes of the initial layout into multiple segments, constructing a constraint graph to represent relationships between the segments, reducing the constraint graph to a stitch graph, determining at least one cut line of the stitch graph, and generating a decomposed layout based on the determined cut line. The decomposed layout in an illustrative embodiment includes first and second sub-layouts comprising respective disjoint subsets of the segments, with each of the sub-layouts of the decomposed layout being associated with a different pattern mask of a double patterning lithography process. The layout decomposition process advantageously minimizes the number of stitches between the sub-layouts without introducing excessive computational complexity.
Public/Granted literature
- US20120196230A1 LAYOUT DECOMPOSITION METHOD AND APPARATUS FOR MULTIPLE PATTERNING LITHOGRAPHY Public/Granted day:2012-08-02
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