Invention Grant
- Patent Title: Method and apparatus for a pressure measuring cell
- Patent Title (中): 用于压力测量单元的方法和装置
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Application No.: US13159347Application Date: 2011-06-13
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Publication No.: US08800378B2Publication Date: 2014-08-12
- Inventor: Thomas Kopp , Jörn Jacob , Martin Mellert , Josef Fehrenbach , Thomas Deck
- Applicant: Thomas Kopp , Jörn Jacob , Martin Mellert , Josef Fehrenbach , Thomas Deck
- Applicant Address: DE Wolfach
- Assignee: VEGA Grieshaber KG
- Current Assignee: VEGA Grieshaber KG
- Current Assignee Address: DE Wolfach
- Agency: Lackenbach Siegel, LLP
- Agent Andrew F. Young, Esq.
- Priority: EP10015383 20101207
- Main IPC: G01L7/00
- IPC: G01L7/00 ; G01L9/00
Abstract:
The invention is for a method and apparatus for a pressure measuring cell for measuring a metered pressure, with a base body having at least one base body electrode and with a membrane body connected to the base body to form a sensor chamber, which has at least one membrane electrode and can be subjected to the pressure of a medium that is below the measurement pressure, wherein both the wall of the sensor chamber that is formed by the base body and the wall of the sensor chamber that is formed by the membrane body is covered with a protective layer; according to the invention, the protective layer is fashioned as a glass layer.
Public/Granted literature
- US20120137785A1 Method And Apparatus For A Pressure Measuring Cell Public/Granted day:2012-06-07
Information query
