Invention Grant
- Patent Title: Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
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Application No.: US12723176Application Date: 2010-03-12
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Publication No.: US08801894B2Publication Date: 2014-08-12
- Inventor: Dan B. Millward
- Applicant: Dan B. Millward
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TrashBritt
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; B23B5/00 ; B23B7/00 ; B32B3/12 ; B32B7/00 ; B82B1/00
Abstract:
Methods for fabricating sub-lithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided.
Public/Granted literature
- US20100163180A1 Sub-10 NM Line Features Via Rapid Graphoepitaxial Self-Assembly of Amphiphilic Monolayers Public/Granted day:2010-07-01
Information query
