Invention Grant
- Patent Title: Granular polycrystalline silicon and production thereof
- Patent Title (中): 颗粒状多晶硅及其生产
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Application No.: US13861950Application Date: 2013-04-12
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Publication No.: US08802046B2Publication Date: 2014-08-12
- Inventor: Dirk Weckesser , Rainer Hauswirth
- Applicant: Dirk Weckesser , Rainer Hauswirth
- Applicant Address: DE Munich
- Assignee: Wacker Chemie AG
- Current Assignee: Wacker Chemie AG
- Current Assignee Address: DE Munich
- Agency: Caesar, Rivise, Bernstein, Cohen & Pokotilow, Ltd.
- Priority: DE102012206439 20120419
- Main IPC: C01B33/02
- IPC: C01B33/02 ; C01B33/027

Abstract:
Granular polycrystalline silicon is disclosed, which has a convexity of 0.850-1.000 and a chlorine content of 10-40 ppmw. Also disclosed is a process for producing granular polycrystalline silicon in a fluidized bed reactor, which includes: (a) fluidization of silicon seed particles by gas flow in a fluidized bed heated by a heating apparatus, (b) addition of a silicon- and halogen-containing reaction gas resulting in pyrolytic deposition of elemental silicon on heated seed particle surfaces, (c) forming the granular polycrystalline silicon, (d) removing from the reactor particles and offgas containing hydrogen halide, and (e) metered addition of fresh seed particles. The hydrogen halide concentration in the offgas is determined as the controlled variable. The rate of metered addition of fresh seed particles and heating output of the heating apparatus are controlled as manipulated variables to keep the hydrogen halide concentration in the offgas within an above-defined range during operation.
Public/Granted literature
- US20130280533A1 GRANULAR POLYCRYSTALLINE SILICON AND PRODUCTION THEREOF Public/Granted day:2013-10-24
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