Invention Grant
US08802453B2 Phase change random access memory and method for manufacturing the same 有权
相变随机存取存储器及其制造方法

  • Patent Title: Phase change random access memory and method for manufacturing the same
  • Patent Title (中): 相变随机存取存储器及其制造方法
  • Application No.: US14026660
    Application Date: 2013-09-13
  • Publication No.: US08802453B2
    Publication Date: 2014-08-12
  • Inventor: Keun Lee
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Gyeonggi-do
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2011-0096810 20110926
  • Main IPC: H01L21/02
  • IPC: H01L21/02
Phase change random access memory and method for manufacturing the same
Abstract:
A phase change random access memory includes a semiconductor substrate having a bottom electrode formed over the semiconductor substrate; and a phase change layer formed over the bottom electrode. The phase change layer a first phase change layer formed over the bottom electrode and including at least one of a first element, a second element, and a third element; and a second phase change layer formed over a surface of the first phase change layer and formed of the first element to prevent an area of the first phase change layer from increasing through diffusion.
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