Invention Grant
US08802495B2 Semiconductor packages, methods of manufacturing the same, and semiconductor package structures including the same
有权
半导体封装,其制造方法以及包括该半导体封装的半导体封装结构
- Patent Title: Semiconductor packages, methods of manufacturing the same, and semiconductor package structures including the same
- Patent Title (中): 半导体封装,其制造方法以及包括该半导体封装的半导体封装结构
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Application No.: US13955259Application Date: 2013-07-31
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Publication No.: US08802495B2Publication Date: 2014-08-12
- Inventor: Ji Hwang Kim , Tae Hong Min , Chajea Jo , Taeje Cho , Young Kun Jee , Yun Seok Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2012-0085396 20120803
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L21/56

Abstract:
A method of manufacturing a semiconductor package includes preparing a parent substrate including package board parts laterally spaced apart from each other, mounting a first chip including a through-via electrode on each of the package board parts, forming a first mold layer on the parent substrate having the first chips, planarizing the first mold layer to expose back sides of the first chips, etching the exposed back sides of the first chips to expose back sides of the through-via electrodes, forming a passivation layer on the planarized first mold layer, the etched back sides of the first chips, and the back sides of the through-via electrodes, and selectively removing the passivation layer to expose the back sides of the through-via electrodes.
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