Invention Grant
- Patent Title: Method and device for accurately measuring the incident flux of ambient particles in a high or ultra-high vacuum environment
- Patent Title (中): 用于精确测量高或超高真空环境中环境颗粒的入射通量的方法和装置
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Application No.: US13116982Application Date: 2011-05-26
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Publication No.: US08803072B2Publication Date: 2014-08-12
- Inventor: James Lawrence Booth , David Erik Fagnan , Bruce George Klappauf , Kirk William Madison , Jicheng Wang
- Applicant: James Lawrence Booth , David Erik Fagnan , Bruce George Klappauf , Kirk William Madison , Jicheng Wang
- Applicant Address: CA Burnaby, British Columbia
- Assignee: British Columbia Institute of Technology
- Current Assignee: British Columbia Institute of Technology
- Current Assignee Address: CA Burnaby, British Columbia
- Agency: Ade & Company Inc.
- Agent Ryan W. Dupuis; Kyle R. Satlerthwa
- Main IPC: G21K1/00
- IPC: G21K1/00 ; G01L27/00 ; H05H3/04 ; G01L21/00 ; C23C14/22 ; C30B23/00 ; C23C14/54
Abstract:
An apparatus and method that can measure flux density in-situ under high vacuum conditions includes a means for confining a collection of identical, elemental sensor particles to a volume of space by initial cooling by laser or another method, then confinement in a sensor volume using externally applied magnetic and/or optical fields.
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