A pattern position detecting method capable of reducing time for detecting a component position includes: acquiring a model image of a target; dividing the acquired model image into reference images each including a specific pattern; acquiring a detected image of the target; matching origins of the reference images respectively with predetermined positions on the detected image; comparing a region within the detected image with corresponding one of the reference images while moving the origin of the reference image in X and Y directions from the corresponding predetermined position and sequentially acquiring correlation values; integrating the correlation values at respective comparison positions within an integrated XY plane to generate integrated correlation values; and recognizing a value of integrated XY coordinates at a peak of the integrated correlation values as deviation of the specific patterns in the reference images from the predetermined positions of the target within the XY plane.