Invention Grant
- Patent Title: Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
- Patent Title (中): 波导,包括波导的装置以及制造波导的方法
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Application No.: US13461297Application Date: 2012-05-01
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Publication No.: US08805147B2Publication Date: 2014-08-12
- Inventor: Yasushi Koyama
- Applicant: Yasushi Koyama
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-110887 20110517
- Main IPC: G02B6/10
- IPC: G02B6/10

Abstract:
Provided are a waveguide with which strain and defect caused by a manufacturing process or the like or caused in a semiconductor in an initial stage or during operation are suppressed so that improvement and stabilization of characteristics are expected, and a method of manufacturing the waveguide. A waveguide includes a first conductor layer and a second conductor layer that are composed of a negative dielectric constant medium having a negative real part of dielectric constant with respect to an electromagnetic wave in a waveguide mode, and a core layer that is in contact with and placed between the first conductor layer and the second conductor layer, and includes a semiconductor portion. The core layer including the semiconductor portion has a particular depressed and projected structure extending in an in-plane direction.
Public/Granted literature
- US20120292512A1 WAVEGUIDE, APPARATUS INCLUDING THE WAVEGUIDE, AND METHOD OF MANUFACTURING THE WAVEGUIDE Public/Granted day:2012-11-22
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