Invention Grant
- Patent Title: Abrasive article with array of composite polishing pads
- Patent Title (中): 具有复合抛光垫阵列的磨料制品
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Application No.: US13275948Application Date: 2011-10-18
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Publication No.: US08808064B2Publication Date: 2014-08-19
- Inventor: Karl G. Schwappach , Zine-Eddine Boutaghou
- Applicant: Karl G. Schwappach , Zine-Eddine Boutaghou
- Applicant Address: US MN North Oaks
- Assignee: Roc Holdings, LLC
- Current Assignee: Roc Holdings, LLC
- Current Assignee Address: US MN North Oaks
- Main IPC: B24D11/00
- IPC: B24D11/00

Abstract:
A polishing article with a plurality of polishing pads adapted to polish a substrate. Gimbal structures are attached to the polishing pads that permit the polishing pads to move independently along at least a pitch axis and a roll axis. Stems supported by preload flexures apply preloads through dimple structures to the polishing pads. A plurality of stand-offs provide fixed boundary conditions between the preload and the gimbal structures. Recesses allow for the preload flexures to move vertically.
Public/Granted literature
- US20120122380A1 ABRASIVE ARTICLE WITH ARRAY OF COMPOSITE POLISHING PADS Public/Granted day:2012-05-17
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