Invention Grant
US08808459B1 Method for cleaning post-sputter disks using tape and diamond slurry
有权
使用胶带和金刚石浆液清洗溅射后圆盘的方法
- Patent Title: Method for cleaning post-sputter disks using tape and diamond slurry
- Patent Title (中): 使用胶带和金刚石浆液清洗溅射后圆盘的方法
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Application No.: US12873485Application Date: 2010-09-01
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Publication No.: US08808459B1Publication Date: 2014-08-19
- Inventor: Noel A. Guiriba , Curtis L. Westerfield
- Applicant: Noel A. Guiriba , Curtis L. Westerfield
- Applicant Address: US CA San Jose
- Assignee: WD Media, LLC
- Current Assignee: WD Media, LLC
- Current Assignee Address: US CA San Jose
- Main IPC: B08B7/00
- IPC: B08B7/00
Abstract:
A method for cleaning a post-sputter flat media disk, comprises submerging the disk in a wet conveyor containing a liquid, loading the disk onto a spindle of a spindle system, rotating the disk, engaging the disk on both sides with a pair of rollers such that the disk is wiped on both sides at a disk-roller interface due to the motion of the spindle system, and dispensing a slurry at the disk-roller interface.
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