Invention Grant
US08808959B2 Resist composition, method of forming resist pattern, novel compound, and acid generator
有权
抗蚀剂组合物,抗蚀剂图案形成方法,新型化合物和酸发生剂
- Patent Title: Resist composition, method of forming resist pattern, novel compound, and acid generator
- Patent Title (中): 抗蚀剂组合物,抗蚀剂图案形成方法,新型化合物和酸发生剂
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Application No.: US12591152Application Date: 2009-11-10
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Publication No.: US08808959B2Publication Date: 2014-08-19
- Inventor: Hideo Hada , Yoshiyuki Utsumi , Takehiro Seshimo , Akiya Kawaue
- Applicant: Hideo Hada , Yoshiyuki Utsumi , Takehiro Seshimo , Akiya Kawaue
- Applicant Address: JP Kanagawa-ken
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JPP2008-291054 20081113; JPP2008-291055 20081113; JPP2008-291056 20081113
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) including a compound represented by (b1-1), a compound represented by (b1-1′) and/or a compound represented by (b1-1″) (R1″-R3″ represents an aryl group or an alkyl group, provided that at least one of R1″-R3″ represents a substituted aryl group being substituted with a group represented by (b1-1-0), and two of R1″-R3″ may be mutually bonded to form a ring with the sulfur atom; X represents a C3-C30 hydrocarbon group; Q1 represents a carbonyl group-containing divalent linking group; X10 represents a C1-C30 hydrocarbon group; Q3 represents a single bond or a divalent linking group; Y10 represents —C(═O)— or —SO2—; Y11 represents a C1-C10 alkyl group or a fluorinated alkyl group: Q2 represents a single bond or an alkylene group; and W represents a C2-C10 alkylene group).
Public/Granted literature
- US20100119974A1 Resist composition, method of forming resist pattern, novel compound, and acid generator Public/Granted day:2010-05-13
Information query
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