The method for filling a liquid material, and the apparatus and the program make it possible, without changing a moving speed of an ejection device, to correct a change in ejection amount and to stabilize an application shape. The method fills a liquid material into a gap between a substrate and a work by using the capillary action. The method includes the steps of: generating an application pattern consisting of a plurality of application areas continuous to one another; assigning a plurality of ejection cycles, each obtained by combining the number of ejection pulses and the number of pause pulses at a predetermined ratio therebetween, to each of the application areas; and measuring an ejection amount at correction intervals and calculating a correction amount for the ejection amount.