Invention Grant
- Patent Title: Semiconductor device and method of automatically inspecting an appearance of the same
- Patent Title (中): 半导体装置及其外观自动检测方法
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Application No.: US13750708Application Date: 2013-01-25
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Publication No.: US08809076B2Publication Date: 2014-08-19
- Inventor: Hideaki Yoshimi , Shinzo Ishibe , Eiji Kurose
- Applicant: Semiconductor Components Industries, LLC
- Applicant Address: US AZ Phoenix
- Assignee: Semiconductor Components Industries, LLC
- Current Assignee: Semiconductor Components Industries, LLC
- Current Assignee Address: US AZ Phoenix
- Agent Rennie William Dover
- Priority: JP2012-015311 20120127
- Main IPC: G01B21/02
- IPC: G01B21/02 ; H01L21/66 ; H01L21/02 ; H01L21/78

Abstract:
The invention provides a semiconductor device and a method of automatically inspecting the appearance, which achieves proper recognition of the size of a chipping occurring from an end portion of the semiconductor device toward the element forming region by an automatic appearance inspection machine, and prevents a problem of judging an appearance non-defective product as an appearance defective product. A semiconductor device includes a resin layer extending from an element forming region over a guard ring surrounding the element forming region so as to cover these except a plurality of portions of the guard ring, and a chipping extending from a chip end portion of a semiconductor device toward the end portion of the resin layer. An end portion of the guard ring partially exposed from the resin layer is used as a reference to measure a distance y from the end portion of the guard ring to the end portion of the chipping and a distance x from the end portion of the guard ring to the end portion of the resin layer. The device is judged as an appearance non-defective product when y is larger than x or is judged as an appearance defective product when y is equal to x or y is smaller than x.
Public/Granted literature
- US20130192078A1 SEMICONDUCTOR DEVICE AND METHOD OF AUTOMATICALLY INSPECTING AN APPEARANCE OF THE SAME Public/Granted day:2013-08-01
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