Invention Grant
- Patent Title: Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same
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Application No.: US13933854Application Date: 2013-07-02
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Publication No.: US08809145B2Publication Date: 2014-08-19
- Inventor: Sanh D. Tang , John K. Zahurak
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
Semiconductor arrays including a plurality of access devices disposed on a buried conductive line and methods for forming the same are provided. The access devices each include a transistor having a source region and drain region spaced apart by a channel region of opposite dopant type and an access line associated with the transistor. The access line may be electrically coupled with one or more of the transistors and may be operably coupled to a voltage source. The access devices may be formed in an array on one or more conductive lines. A system may be formed by integrating the semiconductor devices with one or more memory semiconductor arrays or conventional logic devices, such as a complementary metal-oxide-semiconductor (CMOS) device.
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