Invention Grant
- Patent Title: Nanoneedle plasmonic photodetectors and solar cells
- Patent Title (中): 纳米针等离子体光电探测器和太阳能电池
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Application No.: US12789026Application Date: 2010-05-27
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Publication No.: US08809672B2Publication Date: 2014-08-19
- Inventor: Chih-Wei Chuang , Connie Chang-Hasnain , Forrest Grant Sedgwick , Wai Son Ko
- Applicant: Chih-Wei Chuang , Connie Chang-Hasnain , Forrest Grant Sedgwick , Wai Son Ko
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L31/06
- IPC: H01L31/06 ; H01L31/18

Abstract:
The present disclosure provides a catalyst-free growth mode of defect-free Gallium Arsenide (GaAs)-based nanoneedles on silicon (Si) substrates with a complementary metal-oxide-semiconductor (CMOS)-compatible growth temperature of around 400° C. Each nanoneedle has a sharp 2 to 5 nanometer (nm) tip, a 600 nm wide base and a 4 micrometer (μm) length. Thus, the disclosed nanoneedles are substantially hexagonal needle-like crystal structures that assume a 6° to 9° tapered shape. The 600 nm wide base allows the typical micro-fabrication processes, such as optical lithography, to be applied. Therefore, nanoneedles are an ideal platform for the integration of optoelectronic devices on Si substrates. A nanoneedle avalanche photodiode (APD) grown on silicon is presented in this disclosure as a device application example. The APD attains a high current gain of 265 with only 8V bias.
Public/Granted literature
- US20110146771A1 NANONEEDLE PLASMONIC PHOTODETECTORS AND SOLAR CELLS Public/Granted day:2011-06-23
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