Invention Grant
- Patent Title: Current peak spreading schemes for multiplexed heated array
- Patent Title (中): 多路加热阵列的当前峰扩频方案
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Application No.: US13446335Application Date: 2012-04-13
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Publication No.: US08809747B2Publication Date: 2014-08-19
- Inventor: John Pease , Neil Benjamin
- Applicant: John Pease , Neil Benjamin
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: H05B3/68
- IPC: H05B3/68 ; B23K15/02 ; B23K13/08 ; H05B1/02 ; H05B3/54 ; H05B3/40 ; H05B3/02 ; H05B3/16 ; H05B3/44 ; H05B3/10 ; A21B2/00 ; D02J13/00

Abstract:
A method of operating a heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus, wherein the heating plate comprises power supply lines and power return lines and respective heater zone connected between every pair of power supply line and power return line. The method reduces maximum currents carried by the power supply lines and power return lines by temporally spreading current pulses for powering the heater zones.
Public/Granted literature
- US20130270250A1 CURRENT PEAK SPREADING SCHEMES FOR MULTIPLEXED HEATED ARRAY Public/Granted day:2013-10-17
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