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US08809747B2 Current peak spreading schemes for multiplexed heated array 有权
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Current peak spreading schemes for multiplexed heated array
Abstract:
A method of operating a heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus, wherein the heating plate comprises power supply lines and power return lines and respective heater zone connected between every pair of power supply line and power return line. The method reduces maximum currents carried by the power supply lines and power return lines by temporally spreading current pulses for powering the heater zones.
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