Invention Grant
- Patent Title: Bulk finFET with super steep retrograde well
-
Application No.: US13968570Application Date: 2013-08-16
-
Publication No.: US08809872B2Publication Date: 2014-08-19
- Inventor: Jin Cai , Kevin K. Chan , Robert H. Dannard , Bruce B. Doris , Barry P. Linder , Ramachandran Muralidhar
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/161
- IPC: H01L29/161 ; H01L29/36 ; H01L29/78

Abstract:
A method for forming a fin transistor in a bulk substrate includes forming a super steep retrograde well (SSRW) on a bulk substrate. The well includes a doped portion of a first conductivity type dopant formed below an undoped layer. A fin material is grown over the undoped layer. A fin structure is formed from the fin material, and the fin material is undoped or doped. Source and drain regions are provided adjacent to the fin structure to form a fin field effect transistor.
Public/Granted literature
- US20140159163A1 BULK FINFET WITH SUPER STEEP RETROGRADE WELL Public/Granted day:2014-06-12
Information query
IPC分类: