Invention Grant
- Patent Title: Three dimensional semiconductor memory devices
- Patent Title (中): 三维半导体存储器件
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Application No.: US13229136Application Date: 2011-09-09
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Publication No.: US08809938B2Publication Date: 2014-08-19
- Inventor: Sung-Min Hwang , Hansoo Kim , Changseok Kang , Wonseok Cho , Jae-Joo Shim
- Applicant: Sung-Min Hwang , Hansoo Kim , Changseok Kang , Wonseok Cho , Jae-Joo Shim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd
- Current Assignee: Samsung Electronics Co., Ltd
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2010-0089058 20100910
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115 ; H01L27/108

Abstract:
Three dimensional semiconductor memory devices are provided. The three dimensional semiconductor memory device includes a first stacked structure and a second stacked structure sequentially stacked on a substrate. The first stacked structure includes first insulating patterns and first gate patterns which are alternately and repeatedly stacked on a substrate, and the second stacked structure includes second insulating patterns and second gate patterns which are alternately and repeatedly stacked on the first stacked structure. A plurality of first vertical active patterns penetrate the first stacked structure, and a plurality of second vertical active patterns penetrate the second stacked structure. The number of the first vertical active patterns is greater than the number of the second vertical active patterns.
Public/Granted literature
- US20120061744A1 THREE DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2012-03-15
Information query
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