Invention Grant
- Patent Title: Semiconductor device having trench structure
- Patent Title (中): 具有沟槽结构的半导体器件
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Application No.: US13419400Application Date: 2012-03-13
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Publication No.: US08809942B2Publication Date: 2014-08-19
- Inventor: Shizue Matsuda , Shingo Sato , Wataru Saito
- Applicant: Shizue Matsuda , Shingo Sato , Wataru Saito
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JPP2011-205704 20110921
- Main IPC: H01L29/772
- IPC: H01L29/772

Abstract:
According to an embodiment, a trench structure and a second semiconductor layer are provided in a semiconductor device. In the trench structure, a trench is provided in a surface of a device termination portion with a first semiconductor layer of a first conductive type including a device portion and the device termination portion, and an insulator is buried in the trench in such a manner to cover the trench. The second semiconductor layer, which is of a second conductive type, is provided on the surface of the first semiconductor layer, is in contact with at least a side on the device portion of the trench, and has a smaller depth than the trench. The insulator and a top passivation film for the semiconductor device are made of the same material.
Public/Granted literature
- US20130069109A1 SEMICONDUCTOR DEVICE HAVING TRENCH STRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-03-21
Information query
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