Invention Grant
- Patent Title: Wiring board, semiconductor device, and method for manufacturing wiring board
- Patent Title (中): 接线板,半导体器件和制造布线板的方法
-
Application No.: US13449034Application Date: 2012-04-17
-
Publication No.: US08810007B2Publication Date: 2014-08-19
- Inventor: Akihito Takano , Masahiro Sunohara , Hideaki Sakaguchi , Mitsutoshi Higashi , Kenichi Ota , Yuichi Sasajima
- Applicant: Akihito Takano , Masahiro Sunohara , Hideaki Sakaguchi , Mitsutoshi Higashi , Kenichi Ota , Yuichi Sasajima
- Applicant Address: JP Nagano-ken JP Tokyo
- Assignee: Shinko Electric Industries Co., Ltd.,Taiyo Yuden Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.,Taiyo Yuden Co., Ltd.
- Current Assignee Address: JP Nagano-ken JP Tokyo
- Agency: Fish & Richardson P.C.
- Priority: JP2011-092202 20110418
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/498 ; H01L23/50 ; H05K1/03 ; H05K1/16

Abstract:
A wiring board provided with a silicon substrate including a through hole that communicates a first surface and a second surface of the silicon substrate. A capacitor is formed on an insulating film, which is applied to the silicon substrate, on the first surface and a wall surface defining the through hole. A capacitor part of the capacitor includes a first electrode, a dielectric layer, and a second electrode that are sequentially deposited on the insulating film on the first surface and the wall surface of the through hole. A penetration electrode is formed in the through hole covered by the first electrode, the dielectric layer, and the second electrode of the capacitor part.
Public/Granted literature
- US20120261832A1 Wiring Board, Semiconductor Device, and Method for Manufacturing Wiring Board Public/Granted day:2012-10-18
Information query
IPC分类: