Invention Grant
- Patent Title: Method and apparatus for real-time determination of spherical and non-spherical curvature of a surface
- Patent Title (中): 用于实时确定表面的球面和非球面曲率的方法和装置
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Application No.: US13544939Application Date: 2012-07-09
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Publication No.: US08810798B2Publication Date: 2014-08-19
- Inventor: Jorg-Thomas Zettler , Christian Kaspari
- Applicant: Jorg-Thomas Zettler , Christian Kaspari
- Applicant Address: DE Berlin
- Assignee: Laytec AG
- Current Assignee: Laytec AG
- Current Assignee Address: DE Berlin
- Agency: VLP Law Group LLP
- Agent Kent H. Cheng
- Priority: DE102011078980 20110711; EP11189985 20111121
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/255 ; H01L21/66
Abstract:
The present invention provides for an apparatus for measuring a curvature of a surface of a wafer in a multi-wafer epitaxial reactor.
Public/Granted literature
- US20130021610A1 Method and apparatus for real-time determination of spherical and non-spherical curvature of a surface Public/Granted day:2013-01-24
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