Invention Grant
- Patent Title: Height-measuring method and height-measuring device
- Patent Title (中): 高度测量方法和高度测量装置
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Application No.: US13670133Application Date: 2012-11-06
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Publication No.: US08810799B2Publication Date: 2014-08-19
- Inventor: Takashi Nishikawa
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Priority: JP2010-106870 20100507
- Main IPC: G01B11/24
- IPC: G01B11/24

Abstract:
A height-measuring device (100) in which the focal position of an image-forming optical system (20) is moved in relative fashion in the direction of an optical axis with respect to an object (10) to be measured; scanning is performed; images of the object (10) to be measured, which are formed by the image-forming optical system (20), are obtained in order; and the focal position for individual pixels of the images is found, thereby yielding a relative height value of the object to be measured (10) at positions corresponding to the pixels; wherein a second function (g) is defined on the basis of a first function (f) fitted to a numerical value sequence comprising a coordinate value on the optical axis and a light intensity value for the pixels of a plurality of the images obtained by the scanning, or the coordinate value and a numerical value obtained by processing the light intensity value; and positions on the optical axis at which a correlation value between the numerical value sequence and the second function (g) becomes a maximum value or a minimum value serve as the relative height values of the object to be measured at the positions corresponding to the pixels.
Public/Granted literature
- US20130155415A1 HEIGHT-MEASURING METHOD AND HEIGHT-MEASURING DEVICE Public/Granted day:2013-06-20
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