Invention Grant
- Patent Title: Positioning method for an optical arrangement of a projection illumination system
- Patent Title (中): 投影照明系统的光学布置的定位方法
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Application No.: US13050155Application Date: 2011-03-17
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Publication No.: US08810934B2Publication Date: 2014-08-19
- Inventor: Karl-Eugen Aubele , Erich Merz , Thorsten Rassel
- Applicant: Karl-Eugen Aubele , Erich Merz , Thorsten Rassel
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102010013298 20100329
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G03B27/54 ; G03B27/32

Abstract:
The present disclosure relates to a method for the production and/or adjustment of an optical arrangement of a projection illumination system, in which at least one actuator is used to set the position of at least one optical element to be manipulated by moving the optical element incrementally with a specific increment size. The increment size of the movement increments is set as a function of the distance of the optical element from the desired position, with the distance being represented by a distance value. If the distance value is above a first threshold value, a substantially constant increment size is set, while the specific increment size decreases as the distance from the desired position decreases if the distance value is below the first threshold value. Alternatively or additionally, a pre-specified deviation from the specific increment size and/or from a pre-specified increment size change rate results in a warning signal and/or ceasing of the movement.
Public/Granted literature
- US20110235005A1 POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUMINATION SYSTEM Public/Granted day:2011-09-29
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |