Invention Grant
US08813565B2 Reading circuit for MEMS gyroscope having inclined detection directions 有权
具有倾斜检测方向的MEMS陀螺仪读取电路

Reading circuit for MEMS gyroscope having inclined detection directions
Abstract:
A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes.
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