Invention Grant
US08814522B2 Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
有权
横流风扇叶轮,用于横向激励,脉冲式,气体放电激光器
- Patent Title: Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
- Patent Title (中): 横流风扇叶轮,用于横向激励,脉冲式,气体放电激光器
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Application No.: US11818829Application Date: 2007-06-15
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Publication No.: US08814522B2Publication Date: 2014-08-26
- Inventor: Yoshiho Amada , Thomas D. Steiger , Richard C. Ujazdowski
- Applicant: Yoshiho Amada , Thomas D. Steiger , Richard C. Ujazdowski
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: Martine Penilla Group, LLP
- Main IPC: H01S3/22
- IPC: H01S3/22

Abstract:
A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m≠n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.
Public/Granted literature
- US20080310960A1 Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser Public/Granted day:2008-12-18
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