Invention Grant
- Patent Title: Carbon nanotube synthesizing apparatus
- Patent Title (中): 碳纳米管合成装置
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Application No.: US13791960Application Date: 2013-03-09
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Publication No.: US08815168B2Publication Date: 2014-08-26
- Inventor: Hiroshi Kawarada , Toshiyuki Ohashi , Masahiro Ohta , Ryogo Kato , Toshio Tokune , Hidefumi Nikawa
- Applicant: Honda Motor Co., Ltd. , Waseda University
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Honda Motor Co., Ltd.,Waseda University
- Current Assignee: Honda Motor Co., Ltd.,Waseda University
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Capitol City TechLaw
- Priority: JP2012-077548 20120329; JP2013-040586 20130301
- Main IPC: B01J19/08
- IPC: B01J19/08 ; C23C16/511

Abstract:
A carbon nanotube synthesizing apparatus in which the state of generated plasma can be stabilized is provided. A carbon nanotube synthesizing apparatus 1 comprises a chamber 2, an antenna 3 including a tip 3a, a microwave conductor 4, a gas introducing unit 5, a gas discharging unit 6, a substrate holding unit 7, and a heating unit 8. The shape of the inner wall of the chamber 2 is symmetrical with respect to the tip 3a of the antenna 3.
Public/Granted literature
- US20130259763A1 CARBON NANTUBE SYNTHESIZING APPARATUS Public/Granted day:2013-10-03
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