Invention Grant
- Patent Title: Manufacturing method of metal structure in multi-layer substrate
- Patent Title (中): 多层基板金属结构的制造方法
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Application No.: US13447326Application Date: 2012-04-16
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Publication No.: US08815333B2Publication Date: 2014-08-26
- Inventor: Chih-kuang Yang
- Applicant: Chih-kuang Yang
- Applicant Address: AE Jebel, Ali, Dubai
- Assignee: Princo Middle East FZE
- Current Assignee: Princo Middle East FZE
- Current Assignee Address: AE Jebel, Ali, Dubai
- Main IPC: B05D5/12
- IPC: B05D5/12 ; C23C18/16 ; C23C18/31 ; H05K3/24 ; H01L21/288 ; G03F7/09

Abstract:
Disclosed is a manufacturing method of metal structure in multi-layer substrate. The manufacturing method includes following steps: coating at least one photoresist layer on a surface of a dielectric layer; exposing the photoresist dielectric layer to define a predetermined position of the metal structure; removing the photoresist layer at the predetermined position to undercut an edge of the photoresist layer adjacent to the predetermined position by a horizontal distance of at least 0.1 μm between a top and a bottom of the edge; forming the metal structure at the predetermined position; and forming at least one top-cover metal layer to cover a top surface and two side surfaces of the metal structure. The present invention can form a cover metal layer covering the top surface and the two side surfaces by one single photomask.
Public/Granted literature
- US20120202159A1 MANUFACTURING METHOD OF METAL STRUCTURE IN MULTI-LAYER SUBSTRATE Public/Granted day:2012-08-09
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