Invention Grant
US08815396B2 Abrasive particles comprising nano-sized silicon carbide particles surface-coated with silica, and methods using same
有权
包含用二氧化硅表面涂覆的纳米尺寸碳化硅颗粒的磨料颗粒和使用其的方法
- Patent Title: Abrasive particles comprising nano-sized silicon carbide particles surface-coated with silica, and methods using same
- Patent Title (中): 包含用二氧化硅表面涂覆的纳米尺寸碳化硅颗粒的磨料颗粒和使用其的方法
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Application No.: US12286979Application Date: 2008-10-03
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Publication No.: US08815396B2Publication Date: 2014-08-26
- Inventor: Abhaya K. Bakshi , Isaac K. Cherian
- Applicant: Abhaya K. Bakshi , Isaac K. Cherian
- Applicant Address: US MA Worcester
- Assignee: Saint-Gobain Ceramics & Plastics, Inc.
- Current Assignee: Saint-Gobain Ceramics & Plastics, Inc.
- Current Assignee Address: US MA Worcester
- Agency: Abel Law Group, LLP
- Agent Mike W. Crosby
- Main IPC: B32B5/16
- IPC: B32B5/16 ; B24D18/00 ; C09C1/28
Abstract:
Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes. The particles can comprise nano-sized silicon carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.
Public/Granted literature
- US20090101625A1 Silicon carbide particles, methods of fabrication, and methods using same Public/Granted day:2009-04-23
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