Invention Grant
US08815683B2 Nonvolatile memory electronic device including nanowire channel and nanoparticle-floating gate nodes and a method for fabricating the same
有权
包括纳米线通道和纳米颗粒浮动栅极节点的非易失性存储器电子器件及其制造方法
- Patent Title: Nonvolatile memory electronic device including nanowire channel and nanoparticle-floating gate nodes and a method for fabricating the same
- Patent Title (中): 包括纳米线通道和纳米颗粒浮动栅极节点的非易失性存储器电子器件及其制造方法
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Application No.: US12029528Application Date: 2008-02-12
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Publication No.: US08815683B2Publication Date: 2014-08-26
- Inventor: Sangsig Kim , Chang Jun Yoon , Dong Young Jeong , Dong Hyuk Yeom
- Applicant: Sangsig Kim , Chang Jun Yoon , Dong Young Jeong , Dong Hyuk Yeom
- Applicant Address: KR Seoul
- Assignee: Intellectual Discovery Co., Ltd.
- Current Assignee: Intellectual Discovery Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2007-0018259 20070223; KR10-2007-0018271 20070223
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
A nonvolatile memory electronic device including nanowire channel and nanoparticle-floating gate nodes, in which the nonvolatile memory electronic device, which comprises a semiconductor nanowire used as a charge transport channel and nanoparticles used as a charge trapping layer, is configured by allowing the nanoparticles to be adsorbed on a tunneling layer deposited on a surface of the semiconductor nanowire, whereby charge carriers moving through the nanowire are tunneled to the nanoparticles by a voltage applied to a gate, and then, the charge carriers are tunneled from the nanoparticles to the nanowire by the change of the voltage that has been applied to the gate, whereby the nonvolatile memory electronic device can be operated at a low voltage and increase the operation speed thereof.
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