Invention Grant
- Patent Title: Bulk finFET with super steep retrograde well
- Patent Title (中): 散装finFET具有超陡逆行井
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Application No.: US13708531Application Date: 2012-12-07
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Publication No.: US08815684B2Publication Date: 2014-08-26
- Inventor: Jin Cai , Kevin K. Chan , Robert H. Dennard , Bruce B. Doris , Barry P. Linder , Ramachandran Muralidhar , Ghavam G. Shahidi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/205
- IPC: H01L21/205 ; H01L21/285

Abstract:
A method for forming a fin transistor in a bulk substrate includes forming a super steep retrograde well (SSRW) on a bulk substrate. The well includes a doped portion of a first conductivity type dopant formed below an undoped layer. A fin material is grown over the undoped layer. A fin structure is formed from the fin material, and the fin material is undoped or doped. Source and drain regions are provided adjacent to the fin structure to form a fin field effect transistor.
Public/Granted literature
- US20140159162A1 BULK FINFET WITH SUPER STEEP RETROGRADE WELL Public/Granted day:2014-06-12
Information query
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