Invention Grant
US08815684B2 Bulk finFET with super steep retrograde well 有权
散装finFET具有超陡逆行井

Bulk finFET with super steep retrograde well
Abstract:
A method for forming a fin transistor in a bulk substrate includes forming a super steep retrograde well (SSRW) on a bulk substrate. The well includes a doped portion of a first conductivity type dopant formed below an undoped layer. A fin material is grown over the undoped layer. A fin structure is formed from the fin material, and the fin material is undoped or doped. Source and drain regions are provided adjacent to the fin structure to form a fin field effect transistor.
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