Invention Grant
- Patent Title: Apparatus and method for producing microcomponents and use of
- Patent Title (中): 用于生产微量元件和使用的装置和方法
-
Application No.: US13599985Application Date: 2012-08-30
-
Publication No.: US08815746B2Publication Date: 2014-08-26
- Inventor: Josef Mathuni
- Applicant: Josef Mathuni
- Applicant Address: DE Taufkirchen
- Assignee: R3T GmbH Rapid Reactive Radicals Technology
- Current Assignee: R3T GmbH Rapid Reactive Radicals Technology
- Current Assignee Address: DE Taufkirchen
- Agency: Baker & Hostetler LLP
- Priority: DE102007059717 20071212
- Main IPC: G01L21/30
- IPC: G01L21/30 ; G01R31/00 ; H01L21/302 ; H01L21/461 ; B44C1/22 ; C03C15/00 ; C03C25/68 ; C23F1/00
Abstract:
An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
Public/Granted literature
- US20120325264A1 Apparatus and Method for Producing Microcomponents and Use Of Public/Granted day:2012-12-27
Information query
