Invention Grant
- Patent Title: Apparatuses for fabricating patterns using laser diode
- Patent Title (中): 使用激光二极管制造图案的装置
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Application No.: US13095815Application Date: 2011-04-27
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Publication No.: US08816249B2Publication Date: 2014-08-26
- Inventor: Ying-Chi Chen , Rung-Ywan Tsai , Golden Tiao
- Applicant: Ying-Chi Chen , Rung-Ywan Tsai , Golden Tiao
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW98129223A 20090831; TW99139694A 20101118
- Main IPC: B23K26/08
- IPC: B23K26/08 ; B23K26/06 ; H01S5/22 ; G03F7/20 ; H01S5/022
Abstract:
An apparatus for fabricating patterns using a laser diode is presented. The apparatus includes at least one laser diode, at least one lens and a mask having at least one pin hole, wherein light emitted from the laser diode is emitted through the lens and the pin hole to be focused on a first material layer.
Public/Granted literature
- US20110259856A1 APPARATUSES FOR FABRICATING PATTERNS USING LASER DIODE Public/Granted day:2011-10-27
Information query
