Invention Grant
US08816302B2 Optical arrangement and method for examining or processing an object
有权
用于检查或处理物体的光学布置和方法
- Patent Title: Optical arrangement and method for examining or processing an object
- Patent Title (中): 用于检查或处理物体的光学布置和方法
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Application No.: US13723922Application Date: 2012-12-21
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Publication No.: US08816302B2Publication Date: 2014-08-26
- Inventor: Michael Mei , Ronald Holzwarth , Marc Fischer
- Applicant: Michael Mei , Ronald Holzwarth , Marc Fischer
- Applicant Address: DE Martinsried
- Assignee: Menlo Systems GmbH
- Current Assignee: Menlo Systems GmbH
- Current Assignee Address: DE Martinsried
- Agency: Flynn, Thiel, Boutell & Tanis, P.C.
- Priority: DE102011122230 20111223
- Main IPC: G01N21/31
- IPC: G01N21/31 ; B01J19/12 ; G01N21/64
Abstract:
The invention relates to an optical arrangement (20) and to a method of examining or processing an object (46). Here, a first laser pulse with a first central wavelength and a second laser pulse with a second central wavelength different from the first central wavelength are generated. Both pulses are superimposed in or on the object (46) such that multi-photon absorption takes place there with the involvement of at least one photon of the first laser pulse and at least one photon of the second laser pulse.
Public/Granted literature
- US20130161538A1 OPTICAL ARRANGEMENT AND METHOD FOR EXAMINING OR PROCESSING AN OBJECT Public/Granted day:2013-06-27
Information query
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