Invention Grant
- Patent Title: Method to improve nucleation of materials on graphene and carbon nanotubes
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Application No.: US13482262Application Date: 2012-05-29
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Publication No.: US08816333B2Publication Date: 2014-08-26
- Inventor: Katherina Babich , Alessandro Callegari , Zhihong Chen , Edward Kiewra , Yanning Sun
- Applicant: Katherina Babich , Alessandro Callegari , Zhihong Chen , Edward Kiewra , Yanning Sun
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L51/00
- IPC: H01L51/00

Abstract:
Techniques for forming a thin coating of a material on a carbon-based material are provided. In one aspect, a method for forming a thin coating on a surface of a carbon-based material is provided. The method includes the following steps. An ultra thin silicon nucleation layer is deposited to a thickness of from about two angstroms to about 10 angstroms on at least a portion of the surface of the carbon-based material to facilitate nucleation of the coating on the surface of the carbon-based material. The thin coating is deposited to a thickness of from about two angstroms to about 100 angstroms over the ultra thin silicon layer to form the thin coating on the surface of the carbon-based material.
Public/Granted literature
- US20120235119A1 Method to Improve Nucleation of Materials on Graphene and Carbon Nanotubes Public/Granted day:2012-09-20
Information query
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