Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US13937557Application Date: 2013-07-09
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Publication No.: US08816399B2Publication Date: 2014-08-26
- Inventor: Yoshihiro Ikura
- Applicant: Advanced Power Device Research Association
- Applicant Address: JP Yokohama-shi JP Kawasaki-shi
- Assignee: Furukawa Electric Co., Ltd.,Fuji Electric Co., Ltd.
- Current Assignee: Furukawa Electric Co., Ltd.,Fuji Electric Co., Ltd.
- Current Assignee Address: JP Yokohama-shi JP Kawasaki-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-224356 20121009
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A semiconductor device includes: an electron transit layer formed on a substrate and of a group III nitride-based compound semiconductor; an electron supply layer formed on the electron transit layer and of a group III nitride-based compound semiconductor having a higher band gap energy than the transit layer; a field plate layer formed on the supply layer, formed of a non-p-type group III nitride-based compound semiconductor, and having a lower band gap energy than the supply layer; a first electrode forming an ohmic contact with a two-dimensional electron gas layer in the transit layer at an interface thereof with the supply layer; and a second electrode forming a Schottky contact with the electron gas layer. The second electrode forms an ohmic contact, at a side wall of the field plate layer, with two-dimensional hole gas in the field plate layer at an interface thereof with the supply layer.
Public/Granted literature
- US20140097473A1 SEMICONDUCTOR DEVICE Public/Granted day:2014-04-10
Information query
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