Invention Grant
US08816416B2 Solid-state imaging device with channel stop region with multiple impurity regions in depth direction to reduce leakage of electrical charges and method for manufacturing the same 有权
具有在深度方向上具有多个杂质区域的通道停止区域以减少电荷泄漏的固态成像装置及其制造方法

  • Patent Title: Solid-state imaging device with channel stop region with multiple impurity regions in depth direction to reduce leakage of electrical charges and method for manufacturing the same
  • Patent Title (中): 具有在深度方向上具有多个杂质区域的通道停止区域以减少电荷泄漏的固态成像装置及其制造方法
  • Application No.: US13855855
    Application Date: 2013-04-03
  • Publication No.: US08816416B2
    Publication Date: 2014-08-26
  • Inventor: Kiyoshi Hirata
  • Applicant: Sony Corporation
  • Applicant Address: JP
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP
  • Agency: Sheridan Ross P.C.
  • Priority: JP2002-330150 20021114
  • Main IPC: H01L31/113
  • IPC: H01L31/113
Solid-state imaging device with channel stop region with multiple impurity regions in depth direction to reduce leakage of electrical charges and method for manufacturing the same
Abstract:
Channel stop sections formed by multiple times of impurity ion implanting processes. Four-layer impurity regions are formed across the depth of a semiconductor substrate (across the depth of the bulk), so that a P-type impurity region is formed deep in the semiconductor substrate; thus, incorrect movement of electric charges is prevented. Other four-layer impurity regions of another channel stop section are decreased in width step by step across the depth of the substrate, so that the reduction of a charge storage region of a light receiving section due to the dispersion of P-type impurity in the channel stop section is prevented in the depth of the substrate.
Information query
IPC分类:
H 电学
H01 基本电气元件
H01L 半导体器件;其他类目中不包括的电固体器件(使用半导体器件的测量入G01;一般电阻器入H01C;磁体、电感器、变压器入H01F;一般电容器入H01G;电解型器件入H01G9/00;电池组、蓄电池入H01M;波导管、谐振器或波导型线路入H01P;线路连接器、汇流器入H01R;受激发射器件入H01S;机电谐振器入H03H;扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R;一般电光源入H05B;印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K;在具有特殊应用的电路中使用的半导体器件见应用相关的小类)
H01L31/00 对红外辐射、光、较短波长的电磁辐射,或微粒辐射敏感的,并且专门适用于把这样的辐射能转换为电能的,或者专门适用于通过这样的辐射进行电能控制的半导体器件;专门适用于制造或处理这些半导体器件或其部件的方法或设备;其零部件(H01L51/42优先;由形成在一共用衬底内或其上的多个固态组件,而不是辐射敏感元件与一个或多个电光源的结合所组成的器件入H01L27/00)
H01L31/08 .其中的辐射控制通过该器件的电流的,例如光敏电阻器
H01L31/10 ..特点在于至少有一个电位跃变势垒或表面势垒的,例如光敏晶体管
H01L31/101 ...对红外、可见或紫外辐射敏感的器件
H01L31/112 ....以场效应工作为特征的,如结型场效应光敏晶体管
H01L31/113 .....为导体—绝缘体—半导体型的,如金属—绝缘体—半导体场效应晶体管
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