Invention Grant
- Patent Title: Solid-state imaging device with channel stop region with multiple impurity regions in depth direction to reduce leakage of electrical charges and method for manufacturing the same
- Patent Title (中): 具有在深度方向上具有多个杂质区域的通道停止区域以减少电荷泄漏的固态成像装置及其制造方法
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Application No.: US13855855Application Date: 2013-04-03
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Publication No.: US08816416B2Publication Date: 2014-08-26
- Inventor: Kiyoshi Hirata
- Applicant: Sony Corporation
- Applicant Address: JP
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP
- Agency: Sheridan Ross P.C.
- Priority: JP2002-330150 20021114
- Main IPC: H01L31/113
- IPC: H01L31/113

Abstract:
Channel stop sections formed by multiple times of impurity ion implanting processes. Four-layer impurity regions are formed across the depth of a semiconductor substrate (across the depth of the bulk), so that a P-type impurity region is formed deep in the semiconductor substrate; thus, incorrect movement of electric charges is prevented. Other four-layer impurity regions of another channel stop section are decreased in width step by step across the depth of the substrate, so that the reduction of a charge storage region of a light receiving section due to the dispersion of P-type impurity in the channel stop section is prevented in the depth of the substrate.
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