Invention Grant
- Patent Title: Nonvolatile memory device
- Patent Title (中): 非易失性存储器件
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Application No.: US14075901Application Date: 2013-11-08
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Publication No.: US08816424B2Publication Date: 2014-08-26
- Inventor: Ki-Hong Lee , Kwon Hong
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-Si, Gyeonggi-Do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Icheon-Si, Gyeonggi-Do
- Agency: Lowe Hauptman & Ham, LLP
- Priority: KR10-2008-0134788 20081226
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L29/788 ; H01L29/423

Abstract:
A non-volatile memory includes a channel layer to extend from a substrate in a vertical direction; a plurality of interlayer dielectric layers and a plurality of gate electrodes to be alternately stacked along the channel layer; and a memory layer to be interposed between the channel layer and each of the gate electrodes, wherein the memory layer comprises a tunnel dielectric layer to contact the channel layer, a first charge trap layer to contact the tunnel dielectric layer and formed of an insulating material, a charge storage layer to contact the first charge trap layer and formed of a semiconducting material or a conductive material, a second charge trap layer to contact the charge storage layer and formed of an insulating material, and a charge blocking layer to contact the second charge trap layer.
Public/Granted literature
- US20140061770A1 NONVOLATILE MEMORY DEVICE Public/Granted day:2014-03-06
Information query
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