Invention Grant
US08816432B2 Semiconductor devices including a vertical channel transistor and methods of fabricating the same 有权
包括垂直沟道晶体管的半导体器件及其制造方法

Semiconductor devices including a vertical channel transistor and methods of fabricating the same
Abstract:
Semiconductor devices having vertical channel transistors are provided. The semiconductor device includes an insulation layer on a substrate and a buried bit line on the insulation layer. The buried bit line extends in a first direction. An active pillar is disposed on the buried bit line. The active pillar includes a lower dopant region, a channel region having a first sidewall and an upper dopant region vertically stacked on the buried bit line. A contact gate electrode is disposed to be adjacent to the first sidewall of the channel region. A word line is electrically connected to the contact gate electrode. The word line extends in a second direction intersecting the first direction. A string body connector is electrically connected to the channel region. Related methods are also provided.
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