Invention Grant
- Patent Title: Semiconductor devices including a vertical channel transistor and methods of fabricating the same
- Patent Title (中): 包括垂直沟道晶体管的半导体器件及其制造方法
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Application No.: US13586018Application Date: 2012-08-15
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Publication No.: US08816432B2Publication Date: 2014-08-26
- Inventor: Sua Kim , Jin Ho Kim , Chulwoo Park
- Applicant: Sua Kim , Jin Ho Kim , Chulwoo Park
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2011-0106857 20111019
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
Semiconductor devices having vertical channel transistors are provided. The semiconductor device includes an insulation layer on a substrate and a buried bit line on the insulation layer. The buried bit line extends in a first direction. An active pillar is disposed on the buried bit line. The active pillar includes a lower dopant region, a channel region having a first sidewall and an upper dopant region vertically stacked on the buried bit line. A contact gate electrode is disposed to be adjacent to the first sidewall of the channel region. A word line is electrically connected to the contact gate electrode. The word line extends in a second direction intersecting the first direction. A string body connector is electrically connected to the channel region. Related methods are also provided.
Public/Granted literature
- US20130099305A1 SEMICONDUCTOR DEVICES INCLUDING A VERTICAL CHANNEL TRANSISTOR AND METHODS OF FABRICATING THE SAME Public/Granted day:2013-04-25
Information query
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